Ultrapure water production

In the manufacturing of semiconductor products and solar cells, different water qualities are required depending on the product and production step. Similarly, H+E uses various manufacturing processes for its customers. It is especially important to remove particulate, ionogenic and organic contaminants – for the following reason: in order to meet the highest quality requirements, some ingredients in ultrapure water may only be present in the ppt range (parts per trillion). To achieve this demanding processing goal, adapted treatment steps and a selection of the right materials are required.

Pre-treatment for ultrapure water production
Which process combination is best suited for ultrapure water production depends in each individual case on the available raw water and the desired ultrapure water specification. For its customers, H+E combines pre-treatment processes that are ideally tailored to the required raw water quality. These can be simple multi-layer filters as well as activated carbon filters or ultrafiltration systems.

Make-up for the ultrapure water production
The different steps of the make-up process result in demineralisation and the reduction of organic carbon (TOC). Possible processing technologies are: ion exchange, reverse osmosis, membrane degassing, TOC-UV, EDI and mixed bed technology. The compact ROCEDIS.UPW plant concept we developed for ultrapure water generation is also available for smaller plant throughputs. In accordance with H+E’s personalised approach, our specialists develop process solutions that are precisely adapted to the location of the plant and that ensure the ultrapure water quality required by the customer.

Polishing for ultrapure water production
In the final stage of ultrapure water production, known as polishing, the highest UPW final quality is produced. The final treatment takes place before the water is fed into the distribution network – also known as the loop system. This enables us to ensure the required ultrapure water quality for our plants. This is achieved by UV irradiation, membrane degassing and membrane aeration, the use of a polisher mixing bed and a final ultrafiltration. The SEMICIRCLE loop system then distributes the ultrapure water obtained in the process to the various application sites.

Based on our many years of experience, we offer you:

  • Reliable assessment of the raw water situation regarding critical raw water components
  • Selection of suitable materials and aggregates for ultrapure water production
  • Construction and commissioning of reliable ultrapure water plants Consulting and support in critical operating phases


Our References

Germany 2023

Wastewater treatment at a chemical site rich in tradition

InfraLeuna GmbH and its associated companies are the owners and operators of the infrastructure facilities at Leuna, a chemical site rich in tradition. InfraLeuna GmbH pursues the goal of shaping and developing the framework conditions for the production operations of its customers at the site. This involves the supply of necessary media such as energy and water, disposal through the central wastewater treatment plant and analytical services in its modern laboratory.

Austria 2020

High-End UPW Plant for the Semi-Conductor Industry

The task was to implement a high-end ultrapure water plant for the treatment of well water for a well-known semiconductor manufacturer in Central Europe.

Estland 2020

Award Winner: AS Estonian Cell

In 2020, AS Estonian Cell was declared the winner of the competition ”Environmentally Friendly Company of the Year in Estonia“. With H+E components Estonian Cell came a significant step closer to its goal of becoming the best producer of pulp in the world.

Malaysia 2014

Offshore High Pressure High Performance Produced Water Treatment Package

A high-pressure high-efficiency produced water treatment system of Petronas an Sapura Energy designed to meet strict overboard discharge limits while accommodating onerous space and weight constraints imposed by offshore design requirements.

Denmark 2014

Oily Water Treatment Offshore

For an oil rig, Ørsted needed a treatment plant for treating oily water from various sources. Ørsted, Denmark, is the world market leader in offshore wind energy and offers innovative energy solutions for public utilities and industry.

For an oil rig, Ørsted needed an oily water treatment plant to treat water from various sources to remove oil down to <10 mg/l and 95% of solids >100 μm, making the water suitable for discharge into the sea. This application was a particular challenge due to the small droplet diameters and emulsified oils from the various sources. H+E met the challenge by providing their coalescer design with a solids removal system upstream of the coalescer technology.

Germany 2012

New AOP application in a German paper mill

MD Papier GmbH, which belongs to the UPM Group, is one of Germany’s largest manufacturers of high-quality magazine papers. Due to a shift of production to higher-grade and higher bleached products, the percentage of persistent, non-biodegradable wastewater constituents has increased.