In the manufacturing of semiconductor products and solar cells, different water qualities are required depending on the product and production step. Similarly, H+E uses various manufacturing processes for its customers. It is especially important to remove particulate, ionogenic and organic contaminants – for the following reason: in order to meet the highest quality requirements, some ingredients in ultrapure water may only be present in the ppt range (parts per trillion). To achieve this demanding processing goal, adapted treatment steps and a selection of the right materials are required.
Pre-treatment for ultrapure water production
Which process combination is best suited for ultrapure water production depends in each individual case on the available raw water and the desired ultrapure water specification. For its customers, H+E combines pre-treatment processes that are ideally tailored to the required raw water quality. These can be simple multi-layer filters as well as activated carbon filters or ultrafiltration systems.
Make-up for the ultrapure water production
The different steps of the make-up process result in demineralisation and the reduction of organic carbon (TOC). Possible processing technologies are: ion exchange, reverse osmosis, membrane degassing, TOC-UV, EDI and mixed bed technology. The compact ROCEDIS.UPW plant concept we developed for ultrapure water generation is also available for smaller plant throughputs. In accordance with H+E’s personalised approach, our specialists develop process solutions that are precisely adapted to the location of the plant and that ensure the ultrapure water quality required by the customer.
Polishing for ultrapure water production
In the final stage of ultrapure water production, known as polishing, the highest UPW final quality is produced. The final treatment takes place before the water is fed into the distribution network – also known as the loop system. This enables us to ensure the required ultrapure water quality for our plants. This is achieved by UV irradiation, membrane degassing and membrane aeration, the use of a polisher mixing bed and a final ultrafiltration. The SEMICIRCLE loop system then distributes the ultrapure water obtained in the process to the various application sites.
Based on our many years of experience, we offer you:
- Reliable assessment of the raw water situation regarding critical raw water components
- Selection of suitable materials and aggregates for ultrapure water production
- Construction and commissioning of reliable ultrapure water plants Consulting and support in critical operating phases
